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Plating
The key technology to achieve the RDL process in Panel Level Packaging , Through Glass Vias (TGV) and Probe card MLO.
The Key Technology to Achieve RDL Process — Plating
In the rapidly evolving semiconductor industry, PLP and TGV are gaining strong attention for enabling higher performance and efficiency. At the same time, rising demand for semiconductor testing is accelerating the need for high-yield production. The process depends on plating equipment, together with an in-line concentration analyzer and real-time data monitoring and control, to ensure consistent quality and meet stringent end-product requirements.
Innovative Copper Plating Equipment for Panel-Level Packaging Technology
The RDL interconnection layer in semiconductor chips is critical for producing high-quality end products. Achieving a reliable RDL process requires the use of premium plating equipment. In the technology sector, Manz offers delivers state-of-the-art jig-free copper plating equipment, ensuring superior performance and product quality. Our new vertical electroplating technology eliminates the need for traditional jigs, reducing both equipment and maintenance costs. Additionally, the modular design of our electroplating equipment allows for flexible configuration based on the customer's production capacity and space requirements. The components are easy to operate and disassemble for straightforward maintenance, supporting efficient production and high uniformity. Uniformity: >90% L/S: 5/5 Via: 25 μm AR: 1:1
Probe Card MLO Plating Equipment
To meet the advanced Probe Card Multi-Layer Organic (MLO) substrate requirements for fine-line routing and stable performance, we provide key plating equipment designed specifically for Probe Card MLO manufacturing. With precise control of solution flow, it delivers uniform copper deposition on fine lines as well as inside vias and blind vias, improving reliability. The system supports critical copper plating processes for multilayer structures, offering strong filling capability and excellent uniformity for panel sizes up to 355 mm × 400 mm. Flexible process control, together with real-time data monitoring and control, ensures stable production, high quality, and high yield for HAR, multilayer Probe Card MLO substrates with various copper thicknesses.
Your Benefits
  • Support Robot and AGV system. Customize layout to fit customer’s production line.
  • Modular design reduces chemical usage and lowers maintenance costs.
  • Work with customers to complete process validation at our R&D lab, supported by simulation software for model development and parameter calibration.
Contact us
Manz Asia
Manz Taiwan Ltd. 4F, No. 168-1, Zhongyuan Rd. 320021 Taoyuan City Taiwan
+886 3 4529811
info.tw@manz.com